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microlithography

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microlithography

Using X rays instead of light rays to form the patterns of elements on a chip.



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The next generation of microlithography tools under development utilizes deep-ultraviolet radiation near 157 nm.
Critical data for integrated-circuit manufacturing. (News Briefs) by Journal of Research of the National Institute of Standards and Technology
The new standards use microlithography to make series arrays of large numbers of Josephson junctions to produce higher voltages -- 2,000 for 1 volt, 19,000 for 10 volts.
New voltage standard by Science News
The paper also is scheduled for presentation during the 31st annual SPIE Microlithography conference being held February 19-24, 2006 in San Jose, Calif.
Brion Joint Paper Turns Heads at European Mask and Litho Conference; ... by Business Wire
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