Oxide isolation | Article about oxide isolation by The Free Dictionary
oxide isolation[′äk‚sīd ‚ī·sə′lā·shən]
Isolation of the elements of an integrated circuit by forming a layer of silicon oxide around each element.
References in periodicals archive
Complete oxide isolation
of the active devices from the substrate eliminates the substrate current injection path.
SOI technology provides 'true' oxide isolation
, which is a more rugged isolation than alternative junction isolation.
In addition, they offer improved thermal properties because LDMOS devices do not require a beryllium oxide isolation
layer in the package.
The principle applications are high-rate etching (greater than 30 micron/min) of deep cavities that encapsulate MEMS devices, and etching deep trenches stopping on an oxide isolation