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partial coherence

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partial coherence [′pär·shəl kō′hir·əns]
(physics)
Property of two waves whose relative phase undergoes random fluctuations which are not, however, sufficient to make the wave completely incoherent.


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If these precautions are not taken the theory of partial coherence may have to be used for the computations.
Beam wander, the theory of partial coherence of the source, and phase fluctuations are also covered.
Job-controlled variable numerical aperture and partial coherence enables the imaging to be optimized for a range of conditions, such as thin and thick resist processes.
 
 
 
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