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photolithography |
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photolithographyA lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface. photolithography Electronics a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process |
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| Parallel mixing of photolithographically defined nanoliter volumes using elastomeric microvalve arrays. |
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