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secondary ion mass spectrometer

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secondary ion mass spectrometer [′sek·ən‚der·ē ′ī‚än ′mas spek′tram·əd·ər]
(engineering)
An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kiloelectronvolts bombards a small spot on the surface of a sample, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer. Abbreviated SIMS. Also known as ion microprobe; ion probe.


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Physical Electronics, a division of Phymetrics, introduced the TRIFT III Time-of-Flight Secondary Ion Mass Spectrometer.
FEI Company (NASDAQ:FEIC) makes the last two as well as focused ion-beam systems, secondary ion mass spectrometers, stylus nanoprofilometers and software systems for semiconductor yield improvement.
They are also often used in "hybrid" configurations with other analytical instruments including liquid and gas chromatographs and other forms of mass spectrometers including secondary ion mass spectrometers (SIMS) and magnetic sector mass spectrometers.
 
 
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