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secondary ion mass spectrometer

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secondary ion mass spectrometer [′sek·ən‚der·ē ′ī‚än ′mas spek′tram·əd·ər]
(engineering)
An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kiloelectronvolts bombards a small spot on the surface of a sample, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer. Abbreviated SIMS. Also known as ion microprobe; ion probe.


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