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x-ray photoelectron spectroscopy

   Also found in: Acronyms, Wikipedia 0.01 sec.
x-ray photoelectron spectroscopy [′eks ‚rā ¦fōd·ō·i¦lek‚trän spek′träs·kə·pē]
(spectroscopy)
A form of electron spectroscopy in which a sample is irradiated with a beam of monochromatic x-rays and the energies of the resulting photoelectrons are measured. Abbreviated XPS. Also known as electron spectroscopy for chemical analysis (ESCA).


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Technical examples described focused on structural and chemical analyses of differently processed HfSiO-based gate stacks on Si and SiGe, and emphasized a combined use of multiple techniques, including (i) synchrotron-based x-ray photoelectron spectroscopy (XPS) and x-ray absorption spectroscopy (XAS), and (ii) transmission electron microscopy-based Z-contrast imaging and electron energy loss spectroscopy (EELS).
Energy dispersive X-ray analysis and X-ray photoelectron spectroscopy verified that the TFS[I.
X-ray photoelectron spectroscopy (XPS) was accomplished using a PHI-5702 multi-functional X-ray photoelectron spectrometer with pass energy of 29.
 
 
 
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