chemical vapor deposition
(redirected from Atomic Layer CVD)chemical vapor deposition
[′kem·i·kəl ¦vā·pər ‚dep·ə′zish·ən] (solid-state physics)
The growth of thin solid films on a crystalline substrate as the result of thermochemical vapor-phase reactions. Abbreviated CVD.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.