Auger electron spectroscopy data were collected on PHI 680 Auger nanoprobe equipped with a field emission electron gun and a cylindrical mirror kinetic energy analyzer.
Auger Electron Spectroscopy (AES) is a surface sensitive technique.
Analysis of Sub-Micron Defects by Auger Electron Spectroscopy
(AES)," in Microelectronics Failure Analysis Desk Reference, 5th Edition, Holdford, R.
Argon is commonly used for sputter depth profiling in XPS, as it is similarly used with Auger electron spectroscopy
or time-of-flight mass spectrometry techniques.
Of these techniques, three main instruments have evolved: X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy
(AES), and secondary ion mass spectrometry (SIMS).
In the surface analyzer segment, Auger electron spectroscopy
and time-of-flight secondary ion mass spectrometry are the leading techniques.
Other analytical techniques will include Auger electron spectroscopy
, low-energy electron difraction, and thermal-desorption quadrupole mass spectroscopy.
The techniques of low energy electron diffraction, auger electron spectroscopy
, thermal desorption spectroscopy and work function measurement are used.
The delivery system is a complete characterization of solid surfaces methods of scanning electron microscopy (SEM), Auger electron spectroscopy
(AES), Scanning Auger Microscopy (SAM) and scanning electron microscopy with spin polarization detection of secondary electrons.
Identification and quantification of these segregants is often carried out using Auger electron spectroscopy
Small beams are used for micro-area-selective depth profiling in Auger electron spectroscopy