Auger electron spectroscopy

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Auger electron spectroscopy

[ō′zhā i′lek‚trän spek′träs·kə·pē]
(spectroscopy)
The energy analysis of Auger electrons produced when an excited atom relaxes by a radiationless process after ionization by a high-energy electron, ion, or x-ray beam. Abbreviated AES.
References in periodicals archive ?
The metal oxides of silver-coated copper powders such as 106 and 107 were investigated by Auger spectroscopy and XRD.
In our work we used techniques previously applied in these areas, but a wider variety of them - including Auger spectroscopy, atomic force spectroscopy, and cross-sectional transmission electron microscopy," she says.
Smaller beam sizes and numerical analysis methods are increasing the performance and utility of Auger spectroscopy.
Small-area Auger spectroscopy also is helpful in the failure analysis of microelectronic devices, because it can identify unknown materials formed or deposited on structures during processing (photo).
A second trend in Auger spectroscopy is the use of high-resolution electron energy analyzers for data acquisition.
A third trend is the increased use of numerical methods to enhance the evaluation and interpretation of Auger spectroscopy data.
In an Auger spectroscopy depth profile of a sputtered film, spectral overlap and noise often make the profile data difficult to interpret with traditional peak-height methods.
Single-chamber design combines SEM with EDX and Auger spectroscopy to improve process development of magnetic disks.
X-ray and electron diffraction methods generally are used to characterize the crystal structure of bulk diamond, but techniques such as Raman-scattering spectroscopy, Auger spectroscopy, and electron-energy-loss spectroscopy provide more information on the diamond and non-diamond fractions of films.