cryopump


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cryopump

[′krī·ō‚pəmp]
(cryogenics)
References in periodicals archive ?
A cryogenic pump or cryopump is a vacuum pump which traps vapors and gases by condensing the same on a cold surface.
SHI's renowned engineering departments continue to focus on the latest cryogenic technologies, including innovative cryocooler and cryopump designs.
The cleaned substrates were dried with nitrogen gas and mounted on a substrate holder in an electron beam evaporator, and the evaporation chamber was pumped down using a cryopump supported by a mechanical pump until it reached a base pressure of 6.0 x [10.sup.-7] Torr.
A built-in dual chamber refrigerated condenser, that combines a powerful cryopump and solvent recovery system together with powerful IR lamps, accelerates the speed of evaporation, even for high boiling point solvents such as DMSO.
A 200 lpm oil-free diaphragm pump provides rough vacuum, a 300 lps turbo-molecular pump is used for initial pump down to UHV pressures, and a 1500 lps cryopump is used for steady state operation.
The chamber is pumped to base pressure by using a cryopump equipped with a controlled gate valve.
Throughout the flight, the probes remained immersed in the liquid neon to create a "cryopump effect".
As a final improvement, the pressure in the trap was reduced from 5 X [10.sup.-6] mbar to 3 X [10.sup.-7] mbar by installing a LHe cryopump near the storage volume.
Cryogenic pump manufacturers and service providers Cryopump AG and Cryopump GmbH, sister companies of U.S.-based ACD LLC, have changed their names to ACD CRYO AG and ACD CRYO GmbH, respectively.
To address these problems, three years ago Varian entered into a joint development program with Hewlett Packard laboratories that resulted in both the introduction of a commercially available gas source MBE machine and the fabrication of the first MOMBE-grown HEMT devices.[1] Hydrogen pumping was accomplished by the use of a combination of a large turbopump and a cryopump. The molecular beam switching characteristics are shown in Figure 5.
"The collaboration will leverage SCAI's leadership position in cryopump design and manufacture and SynSysCo's leadership position in vacuum solutions and service," said Robert Deobil, President of SCAI.