Haidinger fringes

Haidinger fringes

[′hī·diŋ·ər ‚friŋ·jəz]
(optics)
Interference fringes produced by nearly normal incidence of light on thick, flat plates. Also known as constant-angle fringes; constant-deviation fringes.
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However, the phase map mea sured using the new Haidinger fringe technique demonstrated no observable local effects in the wafer thickness variation.
THICKNESS VARIATIONS MEASURED IN SILICON WAFERS

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