Haidinger fringes

Haidinger fringes

[′hī·diŋ·ər ‚friŋ·jəz]
(optics)
Interference fringes produced by nearly normal incidence of light on thick, flat plates. Also known as constant-angle fringes; constant-deviation fringes.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
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The measurement technique (sometimes referred to as Haidinger fringes) analyzes interference fringes from the front and back surfaces of the wafer.
THICKNESS VARIATIONS MEASURED IN SILICON WAFERS

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