MEMS


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MEMS

[memz or ¦em¦ē¦em′es]
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.

MEMS

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MEMS

(MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. They are used to make pressure, temperature, chemical and vibration sensors, light reflectors and switches, as well as accelerometers for vehicle airbags, smartphones, tablets and games (see accelerometer).

MEMS technology is also used to make inkjet print heads, microactuators for read/write heads and all-optical switches that reflect light beams to the appropriate output port.

MEMS and MOEMS
When optical components are included in a MEMS device, it is called a micro-opto-electromechanical system (MOEMS). For example, adding a photonic sensor to a silicon chip constitutes a MOEMS device. See micromachine, MEMS mirror, DLP and optical switch.

MEMS vs. Nanotechnology
Sometimes MEMS and nanotechnology are terms that are used interchangeably, because they both deal with microminiaturized objects. However, they are vastly different. MEMS deals with creating devices that are measured in micrometers, whereas nantotechnology deals with manipulating atoms at the nanometer level.


MEMS-based Optical Switch
In an all-optical switch, MEMS mirrors reflect the input signal to an output port without regard to line speed or protocol. This technology is expected to be the dominant method for building photonic switches.







Sample Micromachines
Microfabrica's EFAB system was the first MEMS foundry process to accept CAD files as input, turning customer designs into micromachines much faster than traditional methods. EFAB builds the devices one metal layer at a time. In this image, the square at the top is a microfluidics device with internal passageways used for a "lab on a chip." The multi-arm device (center) is a fuel injection nozzle. Bottom left is an accelerometer, and bottom right is an inductor used in RF circuits. (Image courtesy of Microfabrica Inc., www.microfabrica.com)







MEMS-Based Accelerometer
MEMSIC's dual-axis thermal accelerator is a MEMS-based semiconductor device that works conceptually like the air bubble in a construction level. The square in the middle of the chip is a resistor that heats up a gas bubble. The next larger squares contain thermal couples that sense the location of the heated bubble as the device is tilted or accelerated. (Image courtesy of MEMSIC, Inc.)
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References in periodicals archive ?
A search for details about MEMS oscillator performance leads to a lot of conflicting information.
Technology analysts continue to recognize the importance of Cavendish's RF MEMS products to the smartphone industry.
From our customer engagements we see three trends emerging: commoditization of MEMS sensors, denser package-scale integration of MEMS, and the entry of mainstream CMOS foundries to the MEMS business.
For automotive applications, there are several advantages of the MEMS oscillator in comparison to a traditional quartz resonator or oscillator.
Technavio's report, the Global Optical MEMS Market 2015-2019, has been prepared based on an in-depth market analysis with inputs from industry experts.
Technavio's analysts forecast the revenue of the global MEMS market for consumer electronics to grow at a CAGR of 10.7% in terms of revenue during the period 2014-2019.
"With proven R&D capabilities in driving innovation, Hua Hong Semiconductor has successfully achieved full compatibility between MEMS and standard CMOS from process development to mass production on 200mm manufacturing platform, by delivering wafer processing solutions for monolithic CMOS-MEMS devices, which help customers improve performance and competitiveness of their sensor products," said Dr.
Innovative products and services are gradually capturing the MEMS market and sales are increasing steadily.
MEMS, which vary in design and function, are produced by a process associated with making integrated circuits.
MEMS technology enables relatively straightforward phase shift reconfiguration by dynamically controlling the series capacitance [C.sub.s] [34, 35] or both series capacitance [C.sub.s] and shunt inductance [L.sub.p] [36].
It took the coveted title at the MEMS Executive Congress 2013 held in Napa in the US.