MOEMS


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MOEMS

[′mō‚emz]
References in periodicals archive ?
Scherf, "Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers," Journal of Micro/Nanolithography, MEMS, and MOEMS, vol.
Hiller, "Tunable infrared detector with integrated micromachined Fabry-Perot filter," Journal of Micro/Nanolithography, MEMS, and MOEMS, vol.
In order to perform computerized Chinese pulse diagnosis, the following new MOEMS sensor has been introduced in this paper to extract characteristics of Chinese pulses.
Germany's Cube Optics AG, for example, was established in 2002 by Thomas Paatzsch, a former researcher at the Institute for Microtechnology in Mainz, and a member of the Europractice MOEMS competence center.
The formation of thin films during fabrication of a MOEMS device typically takes place at an elevated temperature and the film growth process gives rise to the thin film stress.
In order to test the increasing numbers of micro-electromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS) that require final packaging in an inert environment, it has become necessary to develop a system for testing such devices in early stages.
It has therefore been considered as an innovative method for a low-cost mass production of polymer microelectromechanical system (MEMS) and microoptoelectromechanical system (MOEMS) devices.
The integration of micro-optics and micro-electro-mechanical systems has created a new class of micro systems, introduced by this collection of 12 chapters that are presented by Motamedi (Revoltech Microsystems) with the intention of providing researchers and graduate students with the foundation necessary to proceed in the design, fabrication, and analysis of state-of-the-art micro-opto- electro-mechanical systems (MOEMS).
This type of system is also particularly useful in the manufacture of sensors and relays and other micro-electro-mechanical (MEMS) and micro-opto-electromechanical (MOEMS) devices.
FeinFocus USA (Stamford, CT, www.feinfocus.com) and Palomar Technologies (Vista, CA, www.palomartechnologies.com) have teamed to address the manufacturing challenges of the optoelectronics, microelectromechanical systems (MEMS)/micro-optoelectromechanical systems (MOEMS) and radio frequency (RF) components markets.
However, micro-electromechanical systems (MEMS) and their optical counterparts, micro-opto-electromechanical systems (MOEMS), are truly revolutionary.
Microcosm also announced support for opto-electro-mechanical modeling of MOEMS within MEMCAD using a single simulation environment incorporating the three domains inherent to 3-D optical MEMS--electronic, mechanical, and free-space optical.