chemical vapor deposition

(redirected from Metal-Organic CVD)

chemical vapor deposition

[′kem·i·kəl ¦vā·pər ‚dep·ə′zish·ən]
(solid-state physics)
The growth of thin solid films on a crystalline substrate as the result of thermochemical vapor-phase reactions. Abbreviated CVD.
References in periodicals archive ?
To prepare these films, the Gelest-UAIM team dismissed metal-organic CVD and physical vapor deposition (sputtering) methods and turned to an inorganic approach to CVD and ALD.
Though not recommended for III-IV metal-organic CVD applications, the GRC's single canister can treat all the gases handled by both of Novapure's canisters.

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