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A micrometer-size mechanical device; compared with an integrated circuit, it has some mechanical parts that stand above the substrate or move freely over it.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
micromachineA MEMS device, which is measured in micrometers. See MEMS.
|A Bunch of Micromachines|
|Microfabrica's EFAB system was the first MEMS foundry process to accept CAD files as input, turning customer designs into micromachines much faster than traditional methods. EFAB builds the devices one metal layer at a time. In this image, the square at the top is a microfluidics device with internal passageways used for a "lab on a chip." The multi-arm device (center) is a fuel injection nozzle. Bottom left is an accelerometer (C-shaped wings), and bottom right is an inductor used in RF circuits. (Image courtesy of Microfabrica Inc., www.microfabrica.com)|
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