SECS/GEM(SEMI Equipment Communications Standard/Generic Equipment Model) Communications protocols between a host computer and semiconductor manufacturing equipment. SECS/GEM is used to control wafer steppers, lithographic equipment, etchers, ion implanters and other machines. SECS is a layer 6 protocol that describes the content of the messages while GEM is a layer 7 application protocol that defines the messages themselves. See OSI model.
Copyright © 1981-2019 by The Computer Language Company Inc. All Rights reserved. THIS DEFINITION IS FOR PERSONAL USE ONLY. All other reproduction is strictly prohibited without permission from the publisher.