SECS/GEM

SECS/GEM

(SEMI Equipment Communications Standard/Generic Equipment Model) Communications protocols between a host computer and semiconductor manufacturing equipment. SECS/GEM is used to control wafer steppers, lithographic equipment, etchers, ion implanters and other machines. SECS is a layer 6 protocol that describes the content of the messages while GEM is a layer 7 application protocol that defines the messages themselves. See OSI model.
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