scatterometer

(redirected from Scatterometry)
Also found in: Dictionary.

scatterometer

[‚skad·ə′räm·əd·ər]
(engineering)
A microwave sensor that is essentially a radar without ranging circuits, used to measure only the reflection or scattering coefficient while scanning the surface of the earth from an aircraft or a satellite.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive ?
The author has organized the main body of his text in five chapters devoted to an introduction to wave scattering, surface backscattering mechanisms, surface backscattering trends and comparisons with measurements, backscattering from the sea surface, and a geophysical model function for wind scatterometry. Adrian K.
In this paper we review some recent advances in the characterization of periodically patterned nanostructures by scatterometry based on SE and MOKE spectroscopy.
Purely Optical Scatterometry. Optical scatterometry is most frequently based on SE and sometimes is combined with spectrophotometry.
Obvious advantages of scatterometry (besides it is nondestructive) are higher sensitivity, no contact with any mechanical tool, and possibility to monitor features beneath the relief such as native oxide overlayers or thermally induced overlayers developed in an oxygen/nitrogen atmosphere.
On the other hand, scatterometry has some disadvantages: spectral measurements are indirect, and the measured spectra sometimes require very difficult analyses to reveal the real profile of the structure, which should be approximately known before starting the fitting procedure (to use it as an initial value).
Another disadvantage of scatterometry is the long computation time during the fitting procedure when complicated structures are analyzed.
The NIST researchers first created a library of simulated data based on typical semiconductor chip feature dimensions to which they can compare actual measurements with AFM, scatterometry and other means.
The new design also includes areas for optical scatterometry measurements and a large field of patterns that can be used for geometry measurements in the SEMs at both low and high accelerating voltages.
The work of O'Brien's team led to wide recognition of satellite scatterometry as the means to remotely sense the surface wind stress of global oceans.
GNSS BISTATIC SCATTEROMETRY. The CYGNSS mission uses a bistatic radar method (i.e., transmitter and receiver in different locations) for measuring winds, as opposed to the monostatic method (i.e., transmitter and receiver on the same satellite) used by traditional scatterometers.
--, 2013: Space-based GNSS scatterometry: Ocean wind sensing using an empirically calibrated model.