tetrafluoromethane


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tetrafluoromethane

[¦te·trə¦flu̇r·ō′meth‚ān]
(organic chemistry)
References in periodicals archive ?
When there are several of these bonds, the effect is compounded, such as in tetrafluoromethane.
for etch and chamber cleaning products such as tetrafluoromethane (CF4) and hexafluoroethane (C2F6) by building a new production facility to manufacture hexafluoride butadiene (C4F6) in Kawasaki, Japan.
Oxygen is the primary gas used for surface treating plastics, though some plasma processes use nitrogen, nitrous oxide, helium, argon, ammonia, tetrafluoromethane, water vapor, or air.
The aluminum industry's Voluntary Aluminum Industrial Partnership has reduced two potent PFCs, tetrafluoromethane (CF4) and hexafluoroethane (C2F6).
Beyond NF3, the company also continues to lead the industry in the development, production and supply of other chamber cleaning and etching gases, including hexafluoroethane (C2F6), tetrafluoromethane (CF4), chlorine trifluoride (ClF3), sulfur hexafluoride (SF6) and hexafluorobutadiene (C4F6).
The EPA program, called the Voluntary Aluminum Industrial Partnership, is committed to make reductions in two potent PFCs, tetrafluoromethane (CF4) and hexafluoroethane (C2F6).
Beyond NF3, Air Products continues to lead the industry in the development, production and supply of other chamber cleaning and etching gases, including hexafluoroethane (C2F6), tetrafluoromethane (CF4), chlorine trifluoride (ClF3), sulfur hexafluoride (SF6) and hexafluorobutadiene (C4F6).