silicon tetrafluoride

(redirected from Tetrafluorosilane)

silicon tetrafluoride

[′sil·ə·kən ¦te·trə′flu̇r‚īd]
(inorganic chemistry)
SiF4 A colorless, suffocating gas absorbed readily by water, in which it decomposes; boiling point, -86°C; used in chemical analysis and to make fluosilicic acid. Also known as silicon fluoride.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive ?
Undesired products like tetrafluorosilane and hexafluorosiloxane are formed by reaction of the HF formed (and also of the [COF.sub.2] with the quartz reactor (20, 23).