Turbomolecular Pump


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The following article is from The Great Soviet Encyclopedia (1979). It might be outdated or ideologically biased.

Turbomolecular Pump

 

a vacuum pump in which a rotating rotor imparts to the molecules of the gas being evacuated an additional velocity in the direction in which they are moving. The rotor consists of a system of disks. The turbomolecular pump attains a vacuum of up to 10–8 newtons/m2 (10–10mm Hg).

The Great Soviet Encyclopedia, 3rd Edition (1970-1979). © 2010 The Gale Group, Inc. All rights reserved.
References in periodicals archive ?
At Pittcon 2014, Oerlikon Leybold Vacuum, Pittsburgh, Pa., introduced its first turbomolecular pump that combines both magnetic and traditional mechanical bearings.
Unlike traditional detectors, the T-Guard sensor does not use a turbomolecular pump to measure the helium partial pressure; it uses a patented helium permeable membrane chip combined with a penning gauge.
The VSK 3000 capacitive gauge head for pressures to 0.1 mbar and a Penning gauge head for monitoring turbomolecular pump applications to [10.sup.-9] mbar are also available.
It is supplied in a CF or ISO-K flange, and is equipped with a 0.8 DIVAC diaphragm backing pump and the new SL 80 turbomolecular pump. The wide-range turbo pump has an integrated frequency converter, air cooling, ceramic ball bearing, and splinter guard.
Caption: Figure 1: (a) Sketch of ALD technique (Pump 1: turbomolecular pump. Pump 2: sliding-vane rotary vacuum pump) and (b) XRD pattern of the surface of the treated sample.
As second step a turbomolecular pump must be enabled, when it accelerates and reaches necessary rotational speed.
A high-quality patented vibration dampening system avoids vibrations being telegraphed from the primary vacuum pumps to the mass spectrometer (especially to the turbomolecular pump inside the MS).
The GCMS-QP2020 high-sensitivity gas chromatograph mass spectrometer features a proprietary multi-function ion source, patented high-speed scan control and an ultra-fast turbomolecular pump. These features, along with comprehensive databases and multiple sample introduction devices, are said to enable excellent performance and custom configurations tailored to fit the needs of laboratories.