atomic layer deposition


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atomic layer deposition

A semiconductor manufacturing technique that deposits a single layer on a chip that is only one atom or one molecule thick. As elements on a chip decreased to below 100 nm, this essential technology for making the chip ever smaller became commercial after the turn of the 21st century. For example, Applied Materials introduced its first atomic layer deposition chamber in 2001.
References in periodicals archive ?
Contract notice: Atomic layer deposition (ald) system with glovebox
*On the basis of technology, the atomic layer deposition (ALD) segment is estimated to grow at a CAGR of 16.9%, in terms of revenue.
Picosun Group, supplier of AGILE ALD (Atomic Layer Deposition) thin film coating solutions, has revealed its results in increasing micro-LED performance using ALD passivation.
Their topics include synthesizing and characterizing nanocrystalline zinc oxide thin film prepared by atomic layer deposition, vibrational properties of a glass fabric/cashew nut shell liquid resin composite, a graphene-based nanocomposite for remediating inorganic pollutants in water, flame spraying of polymers: distinctive features of the equipment and coating applications, and piezoelectric polymer nanocomposites for energy-scavenging applications.
Along with being applicable in Atomic Layer Deposition, copper (I) hexafluoroacetylacetonate 1, 5- cyclooctadiene is also used as a precursor in preparation of copper films by CVD (Chemical Vapour Deposition) used in microelectronics.
The company's ultra-thin, biocompatible and bioactive ALD (Atomic Layer Deposition) films encapsulates surgical implants and improves their adhesion to bone.
Thanks to enhancements in the V-NAND's atomic layer deposition process, manufacturing productivity has also increased by more than 30 percent.
Veeco Instruments announced that the Materials for Energy Conversion and Storage Group at Delft University of Technology has ordered its Fiji F200 Plasma-Enhanced Atomic Layer Deposition system.
In the chemical, medical, manufacturing and power industries, Alicat says its instruments rapidly and precisely monitor and control critical process parameters and the speed and reliability of Alicat devices are particularly well suited to vacuum coating processes, such as Atomic Layer Deposition and Chemical Vapour Deposition.
The bimorph is built using atomic layer deposition -- chemically "painting" atomically thin layers of silicon dioxide onto aluminum over a cover slip -- then wet-transferring a single atomic layer of graphene on top of the stack.
[Al.sub.2][O.sub.3] film can be fabricated by several methods, including chemical vapor deposition [2], electron beam evaporation [3], magnetron sputtering [4], the sol-gel process [5], pulsed laser deposition [6], and atomic layer deposition [7].