Electrical engineers present their research results on the modal analysis of microelectromechanical systems using ultrasonic base excitation, decentralized fault detection in wireless sensor network based on Gaussian function error, the static behavior analytic and numerical analysis of micro-machined thermal accelerometers, a clamped-clamped beam resonator
capacitive magnetometer based on a microelectromechanical system, extending the range for single hop wireless sensor networks with wake-up receivers, and a HW/SW implementation of FPGA of absolute robot localization using webcam data.
The input and output resonators oscillate in the first mode of a single clamped-clamped beam resonator. However, they oscillate in-phase in the first mode of the filter, whereas they oscillate 180[degrees] out-of-phase in the second mode of the filter.
To discuss the proposed methodology in this paper and without loss of generality, we present closed-form expressions for the natural frequencies and mode shapes of micromechanical filters made of two clamped-clamped beam resonators connected via a coupling beam.
For a micromechanical filter made of two clamped-clamped beam resonators connected via a coupling beam, we solved a boundary-value problem (BVP) composed of five equations and twenty boundary conditions for its natural frequencies and mode shapes.
Khine, "Nonlinear behavior of SOI free-free micromechanical beam resonator
," Sensors and Actuators, A: Physical, vol.
Rogel-Salazar, "Unstable Bessel beam resonator
," Optics Commun., Vol.
As shown in Figure 9, the Q of a lateral free-free beam resonator is 10,743 at 10.47 MHz.
To maximize the Q of the resonator, free-free (FF) beam resonators (6) are required, since the anchor dissipation of this type of resonator is optimized using quarter wavelength suspension beams.
Simple cantilever and fixed beam resonator
structures that use electrostatic actuation were fabricated on 200 mm wafers in standard production tools, using materials and processes routinely employed for on-chip interconnect in a typical CMOS line.
The editors have organized the sixteen contributions that make up the main body of the text in three parts devoted to techniques for the fabrication of nanocantilever beams, nonlinearity of nanocantilever beam resonators
, and applications for nanocantilever beams.