Electrical engineers present their research results on the modal analysis of microelectromechanical systems using ultrasonic base excitation, decentralized fault detection in wireless sensor network based on Gaussian function error, the static behavior analytic and numerical analysis of micro-machined thermal accelerometers, a clamped-clamped beam resonator
capacitive magnetometer based on a microelectromechanical system, extending the range for single hop wireless sensor networks with wake-up receivers, and a HW/SW implementation of FPGA of absolute robot localization using webcam data.
Rogel-Salazar, "Unstable Bessel beam resonator
," Optics Commun.
As shown in Figure 9, the Q of a lateral free-free beam resonator is 10,743 at 10.
To maximize the Q of the resonator, free-free (FF) beam resonators (6) are required, since the anchor dissipation of this type of resonator is optimized using quarter wavelength suspension beams.
Simple cantilever and fixed beam resonator
structures that use electrostatic actuation were fabricated on 200 mm wafers in standard production tools, using materials and processes routinely employed for on-chip interconnect in a typical CMOS line.
Force transducers, or sensors, are recently being designed and constructed as MEMS devices which use polysilicon beam resonator
as sensors in order to relate the force that is being measured to the frequency of vibration of the resonator.
The editors have organized the sixteen contributions that make up the main body of the text in three parts devoted to techniques for the fabrication of nanocantilever beams, nonlinearity of nanocantilever beam resonators
, and applications for nanocantilever beams.