Surface micromachining has been viewed as more cost-effective whereas bulk micromachining
was often chosen for higher sensitivity and precision.
In addition, the bulk micromachining
of the silicon, a technology we have migrated from our Advanced Sensors business, greatly improves product delivery dates.
Ten chapters are arranged in sections devoted to lithography (photolithography and next-generation lithographies); pattern transfer with subtractive techniques (dry etching, wet chemical etching and we bulk micromachining
, thermal energy-based removing, and mechanical energy-based removing); pattern transfer with additive techniques (physical and chemical vapor deposition, micromolding techniques, and chemical, photochemical, electrochemical, and thermal energy-based forming techniques).
If material is removed from the substrate, the process is called bulk micromachining
(BMM), and if deposited layers are removed, the process is called surface micromachining (SMM).
Coverage includes discussion of the electrical, structural, fluidic, transport, and control aspects of MEMS; materials; micromolding; fabrication, characterization, and reliability of single-crystal silicon carbide MEMS; ion etching for bulk micromachining
of silicon carbide; polymer microsystems; optical diagnostics; aerospace applications; packaging of harsh environment MEMS devices; and molecular self-assembly.
Until now, microcalorimeters always have been fabricated using bulk micromachining
techniques where thermal isolation of the detector is achieved by removing the Si substrate from behind the detector, leaving the detector supported by only a thin membrane of silicon nitride.
Accordingly, there are three main approaches, namely bulk micromachining
, surface micromachining and LIGA.
There are three primary categories of micromachining: bulk micromachining
, surface micromachining and micromolding.
The micromechanical velcro structures shown in Figure 6 were fabricated with a bulk micromachining
The microstructures are made using three distinct micro-fabrication processes-surface micromachining, bulk micromachining
, and the LIGA process.
Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining
, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes.
MEMS process technology can be roughly divided into bulk micromachining
, surface micromachining, "hybrid" micromachining, and high-aspect ratio micromachining.