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A problem with diffusion pumps is the issue of vaporized pumping fluid entering the vacuum chamber.
However, both diffusion pumps and turbopumps require molecular-flow conditions at their exhaust ports.
The massive mechanical and diffusion pumps shown in Fig.
BOC Edwards has added to its range of high throughput industrial diffusion pumps with the launch of its biggest model yet.
The new primary pumps are the ideal complement to Varian turbo and diffusion pumps in mass spectrometers and other analytical instruments.
They can be also used for pumping of gases and are used as backing pumps in series with roots blowers, diffusion pumps, etc.
The vacuum pumping system uses cryogenic pumps for the critical hard-vacuum portion of the vacuum pump-down cycle, instead of the more conventional diffusion pumps.

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