disilane


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disilane

[dī′si‚lān]
(inorganic chemistry)
Si2H6 A spontaneously flammable compound of silicon and hydrogen; it exists as a liquid at room temperature.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
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To improve the accuracy of the calculations, we consider the parent molecule disilane, [Si.sub.2][H.sub.6] cluster model (see Figure 1(a)).
In their work, amorphous silicon thin film with a thickness of 50 nm was fabricated by using disilane through LPCVD [117].
Doping precursors for investigated epitaxial layers were disilane (Si[H.sub.4]) and diethylzinc (DEZn).
In Low Pressure Chemical Vapour Deposition (LPCVD) the deposited material is generated by thermal decomposition (pyrolysis) of precursor gases like silane (Si[H.sub.4]) or disilane ([Si.sub.2][H.sub.6]) according to the chemical reactions: Si[H.sub.4] (g) [right arrow] Si (s) + 2[H.sub.2] (g) or [Si.sub.2][H.sub.6] (g) [right arrow] 2Si (s) + 3[H.sub.2] (g), respectively.