electron cyclotron resonance reactor

electron cyclotron resonance reactor

[i¦lek‚trän ¦sī·klə‚trän ′rez·ə·nəns rē‚ak·tər]
(engineering)
A plasma reactor in which resonant coupling of microwave energy into an electron gas at electron cyclotron resonance accelerates electrons, which in turn ionize and excite the neutral gas, resulting in a low-pressure, almost collisionless plasma.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive ?
Billard, Ecole des Mines; and "Deposition of thin films for optical applications in a matrix distributed electron cyclotron resonance reactor," D.
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