electron-beam lithography


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electron-beam lithography

[i′lek‚trän ‚bēm li′thäg·rə·fē]
(electronics)
Lithography in which the radiation-sensitive film or resist is placed in the vacuum chamber of a scanning-beam electron microscope and exposed by an electron beam under digital computer control; after exposure, the film is removed from the vacuum chamber for conventional development and other production processes.
References in periodicals archive ?
This latest product utilises a manufacturing method that combines nanostructure technology developed by Toppan Printing with high resolution electron-beam lithography to control light interference and scattering.
Tenders Are Invited for Supply of an Electron-Beam Lithography System.
Designed for rapid prototyping of high-quality nanostructures, SwissLitho's NanoFrazor exceeds resolution capabilities of standard technologies, such as electron-beam lithography.
Their topics include the green synthesis of silver nanoparticles using Momordica charantia (bitter melon) fruit extracts, an in-house approach for fabricating poly-silicon nanobiosensors using a conventional photolithography and etching method, photovoltaic properties of dye-sensitized solar cells using novel aligned zinc oxide nanorod arrays on a catalyst doped with tin and seeded with zinc oxide with different aspect ratios, optimizing linear oxide width using local anodic oxidation lithography for fabricating semiconductor and metal nanowires, and a fundamental study of electron-beam lithography beyond the sub 100 nanometer process and its application.
For this technique, metal gratings with dimensions in the 100nm range are patterned next to ridge structures in semiconductor material using electron-beam lithography.
TELECOMWORLDWIRE-March 26, 2012-Micronova selects Vistec's electron-beam lithography system(C)1994-2012 M2 COMMUNICATIONS http://www.
A template was created using electron-beam lithography, and a thin layer of aluminum oxide was added on top of that using atomic layer deposition.
Advantest Corporation is the world's leading automatic test equipment supplier to the semiconductor industry, and also produces electronic and optoelectronic instruments and nanotechnology systems, including electron-beam lithography systems.
Lead project researcher Aleksander Angelov says the molds are made of silicon using standard micro-machining techniques including electron-beam lithography and deep reactive ion etching.
In the past, all individual samples of RM 8090 or SRM 2090 were made by direct write electron-beam lithography, because optical lithography did not have the required resolution.
The PNA THz network analyser supports a broad range of projects in nanoelectronics, complemented by a new electron-beam lithography facility.
With other techniques for electron-beam lithography, there are ways to interface that microscope where you can control the beam.

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