electron-beam lithography


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electron-beam lithography

[i′lek‚trän ‚bēm li′thäg·rə·fē]
(electronics)
Lithography in which the radiation-sensitive film or resist is placed in the vacuum chamber of a scanning-beam electron microscope and exposed by an electron beam under digital computer control; after exposure, the film is removed from the vacuum chamber for conventional development and other production processes.
References in periodicals archive ?
On all components of the electron-beam lithography a guarantee in the amount of at least one year is granted.
30 Electron-Beam Lithography Systems from Vistec Lithography 102 8.
A template was created using electron-beam lithography, and a thin layer of aluminum oxide was added on top of that using atomic layer deposition.
Advantest Corporation is the world's leading automatic test equipment supplier to the semiconductor industry, and also produces electronic and optoelectronic instruments and nanotechnology systems, including electron-beam lithography systems.
Lead project researcher Aleksander Angelov says the molds are made of silicon using standard micro-machining techniques including electron-beam lithography and deep reactive ion etching.
In the past, all individual samples of RM 8090 or SRM 2090 were made by direct write electron-beam lithography, because optical lithography did not have the required resolution.
The PNA THz network analyser supports a broad range of projects in nanoelectronics, complemented by a new electron-beam lithography facility.
Vistec Electron Beam, located in Jena, Germany, is providing electron-beam lithography equipment based on shaped beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world.
Other groups have been working on approaches involving X-ray or electron-beam lithography.
WARSAW, Poland & JENA, Germany -- Vistec Electron Beam GmbH, a leading supplier of electron-beam lithography systems, announced that the noted Institute of Electronic Materials Technology (ITME) in Warsaw purchased a Variable Shaped Beam system SB251 from Vistec.
The researchers use electron-beam lithography to make a pattern on an organic film layer.
fi ) has selected one of its electron-beam lithography systems.

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