BMC's silicon MEMS-based electrostatic actuator
DM, with a 12x12 actuator grid array in a 4.4[mm.sup.2] area, corrects for higher spatial orders as well.
A parallel electrostatic actuator
is usually made of two electrodes which has two surfaces facing each other.
New Electrostatic Actuator
High Voltage Integrated Circuits - Using proprietary High Voltage CMOS/DMOS technology, the DH9685AB, a 240V, 96-Channel, Precision High Voltage Programmable 16-bit DAC with Sample & Hold is designed for next-generation, high density, small footprint, low power systems using MEMS or MOEMS activation with electrostatic forces.
The company said that at the Photonix Expo & Conference it will highlight: new electrostatic actuator
high voltage integrated circuits, including the DH9685AB, a 240V, 96-channel, precision high voltage programmable 16-bit DAC with Sample & Hold and the DH9665A, 96-channel, high voltage sample & hold linear amplifier; independent pure-play MEMS foundry capabilities on 150mm and 200mm wafers; and HV ASIC design.
Of course, for an electrostatic actuator
, the operating voltage increases to generate a higher force.
"This means that the steam engine with only one piston has about the same force as the electrostatic actuator
with 100 beams," said McWhorter, manager of the Silicon Technology Department at Sandia.
"HASEL actuators synergize the strengths of soft fluidic and soft electrostatic actuators
, and thus combine versatility and performance like no other artificial muscle before.
Zhao, "Nonlinear behavior for nanoscale electrostatic actuators
with Casimir force," Chaos, Solitons and Fractals, vol.
Valves with electrostatic actuators
are often used in micro technology-based systems.
The large section of general papers discusses mechanical brakes for electrostatic actuators
, top cap designs for the micro loop heat pipe, the stiffness and resonant frequency of a parylene suspended structure, and improvement of metal thin films by very low energy argon ion irradiation.