ellipsometer

ellipsometer

[ə‚lip′säm·əd·ər]
(optics)
An instrument for determining the degree of ellipticity of polarized light; used to measure the thickness of very thin transparent films by observing light reflected from the film.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive ?
Delegation was briefed about metrology grade spectroscopic ellipsometer, electro physical process reliability and such other machines.
They were given a briefing about a metrology grade spectroscopic ellipsometer, electro physical process reliability and other machines.
The thickness of the titania films was measured using Filmetrics F20 thin-film analyzer and VASE Ellipsometer VB-400 (Figure S1, Supporting Information).
The thickness of the applied coatings on the glass substrate has been determined by an ellipsometer. The data were acquired and analyzed by using the WVASE32 (ex situ) and CompleteEASE (in situ/ex situ) software.
The Ti[O.sub.2] film's thickness of 84 nm was measured by using an ellipsometer.
The optical C[O.sub.2] gas detection experiments were carried out by measuring the transmission signals in a normal incident configuration of a variable-angle ellipsometer at room temperature.
Spectroscopic ellipsometry (SE) measurements were performed by a Jobin Yvon UVISEL-NIR phase modulated spectroscopic ellipsometer apparatus, at an angle of incidence of 65[degrees] over the range 300-1600 nm with a resolution of 5 nm.
Analyses were mainly carried out by reflection analysis (by ultraviolet-visible spectroscopy, Lambda 750 UV/VIS Spectrometer, Perkin Elmer, Waltham, MA, USA) and ellipsometer (UviselErAgms-nds, Horiba Jobin Yvon, Kyoto, Japan) and finally by the performance of the fabricated silicon solar cells with or without ARC.
PHE-102 Spectroscopic Ellipsometer (250-2300 nm) was used to measure thicknesses of the films.
Spectroscopic ellipsometer (UVISEL-NIR, Horiba JobinYvon) was used to measure the film thickness.