2, 2014 /PRNewswire/ -- MEI Wet Processing Systems and Services revealed performance data today on its newly released Cu & TiW Critical Etch
System for compound semiconductor manufacturing.
The 700-Series (200mm/300mm) etch
system provides state-of-the-art etch
and integrated automation processing capability with high productivity and industry leading equipment performance and reliability.
The 6500 Advanced Etch
system was selected on the basis of the unique capabilities of our innovative HRe(-) (High-density Reflected electron) source," said Thomas Mika, President & CEO of Tegal Corporation.
The massive cementite particles are visible with the outline made by the etch
As the strong momentum of aluminum interconnects continues for Flash and DRAM applications, the Opus AdvantEdge system confirms Applied's commitment to providing customers with the most advanced, cost-efficient etch
technology to enable their current and future-generation device designs.
As things got smaller, people had to look for a different way to etch
," says Chris Daverse, a SEMATECH physicisf.
Hitachi High-Technologies America is an ideal partner for this development since its new XT etch
chamber reduces process complexity by offering a single-chamber room temperature etch
solution for these advanced high-k and metal gate materials.
Unaxis Wafer Processing, a global leader in deposition and etch
solutions, announced today their latest technology breakthrough allowing device manufacturers to descend to the 45nm technology node and beyond
In particular, IPMS will etch
high aspect ratio structures, required for a new bar code laser scanning technology that has been co-developed with Intermec Technologies Corp.
The AdvantEdge system provides unparalleled process control to reduce critical dimension variation by up to 50% compared with any other etch
Tegal Corporation (Nasdaq:TGAL) today announced that a US-based technology company has placed an order for 6540 advanced etch
system for the development of RRAM (Resistive Random Access Memory) devices incorporating certain unique new materials.
Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch
and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced the sale of several 900 and 980ACS plasma etch
systems to four different customers in the US and Europe.