Etch cleaning | Article about etch cleaning by The Free Dictionary
etch cleaning[′ech ‚klēn·iŋ]
Removing soil by electrolytic or chemical action; removes some of the surface metal along with the dirt.
References in periodicals archive
This includes etch cleaning
that can be used by dip or spray and which do not, even on alloys, require a desmutting stage.
FSI's expertise in the areas of post via etch, post trench etch, post barrier etch cleaning
and other surface conditioning processes for use in copper and low k dual damascene processing compliments the expertise of other Alliance members.
Under the development alliance, Axcelis and SEZ will investigate the cost and performance advantages of optimizing the combined dry strip and wet clean operations for FEOL and BEOL photoresist removal and post etch cleaning