feature size

feature size

The size of the elements on a chip, which is designated by the "DRAM half pitch." The smallest feature size is generally smaller than the feature size for a technology generation (technology node). For example, the 180 nm technology generation will have gate lengths smaller than 180 nm. See DRAM half pitch and process technology.
References in periodicals archive ?
Photonic crystals that block infrared and visible light are difficult to make because of the small feature size required.
All systems enable typical feature size from several micrometers to less than 50 nanometers with aspect ratios approaching 100:1.
Samsung's launch of a flash memory at the 70nm technology node marks the first time that DRAM has been surpassed as the device type with the smallest feature size.
CAD filtering through feature size is also implemented in Icepro 4.
With the most widely pursued planar FeRAM cell concepts, only structural cell sizes down to approximately 10F-squared are achievable, with F being the minimum feature size of the process.
The next TwinFlash technology node with feature sizes of only 110nm is being developed to further improve cost position and to enable larger densities of up to 2Gbit.
As feature sizes in microelectronic components continue to shrink, the stresses associated with the earliest stages of film growth raise serious concerns in the industry about device performance and reliability.
The SCORR process has been shown to be effective at cleaning feature sizes down to the seven-micron level, which is the benchmark for the industry.
As the lateral feature sizes of complementary metal oxide semiconductor field-effect-transistors are scaled downward, the gate dielectric capacitance must be increased in order to maintain the same drive current.
The next major steps for lithography are expected to be systems using 157 am light, ultimately achieving feature sizes in the range of 70 nm.

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