high etch

high etch

[′hī ¦ech]
(graphic arts)
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References in periodicals archive ?
High concentrations can lead to high etch depth and undesired galvanic corrosion.
In this regime the flow of reactive neutrals dominates over diffusion with the resulting high etch rates.
The Apollo from Trion Technology is a stripping system with ICP RF bias on the sample and an optional electrostatic chuck that provides runs at low power levels to achieve high etch rates, uniform etches, and low damage to the wafer.
In addition to demonstrating sustained high etch rates, the new ProNova2[TM] reactor offers a three-fold improvement in ion uniformity over standard ICP sources.
The ability to etch sufficient amounts to provide a good solderable surface no longer needs to be compromised by localized high etch rates.
A high etch rate can increase the throughput significantly, thereby decreasing the cost of ownership of the system.
In addition to demonstrating sustained high etch rates, the new reactor offers a three-fold improvement in ion uniformity.
A high etch rate of 6 mu m/min gives a high throughput for this application.
Together with its high reliability, broad process windows, and high etch rates, the Tegal 110 S/DE system is a critical enabler for etching silicon (S) and dielectric (DE) films found in the MEMS/MOEMS, bio-tech, and hi-voltage markets.
3~), to achieve a high etch rate, while operating at a low (1-20 mtorr) pressure.
Together with its high reliability, broad process windows, and high etch rates, the Tegal 200 SE system is a critical enabler for etching silicon (SE) films found in the MEMS, bio-tech, power IC, optoelectronic, and 3D-IC markets.

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