The HBr chemistry has been chosen for this step because of the high etch selectivity between silicon and silicon dioxide.
* Low stress silicon nitride is used as the mechanical material, because it has high etch resistivity against hydrofluoric acid and potassium hydroxide.
High concentrations can lead to high etch
depth and undesired galvanic corrosion.
The company has launched a PFOS-free TARC that is unique to the market, and is also expanding its line of outgassing-free, high etch
In this regime the flow of reactive neutrals dominates over diffusion with the resulting high etch
The Apollo from Trion Technology is a stripping system with ICP RF bias on the sample and an optional electrostatic chuck that provides runs at low power levels to achieve high etch
rates, uniform etches, and low damage to the wafer.
The ability to etch sufficient amounts to provide a good solderable surface no longer needs to be compromised by localized high etch
A high etch rate can increase the throughput significantly, thereby decreasing the cost of ownership of the system.
A high etch rate of 6 mu m/min gives a high throughput for this application.
A high etch
rate of 6 [[micro]meter]/min gives a high throughput for this application.
The winning technology will have to generate high plasma densities (|is greater than~ |10.sup.11~/|cm.sup.3~), to achieve a high etch
rate, while operating at a low (1-20 mtorr) pressure.