high-aspect-ratio micromachining

high-aspect-ratio micromachining

[‚hī ¦as‚pekt ‚rā·shō ‚mī·krō·mə′shēn·iŋ]
(engineering)
Microfabrication processes that produce tall microstructures with vertical sidewalls. Abbreviated HARM.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
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