integrated thermionic circuit

integrated thermionic circuit

[′in·tə‚grād·əd ¦thər·mē¦än·ik ′sər·kət]
(electronics)
A circuit fabricated from subminiature thin-film metal patterns on two planar substrates separated by an evacuated space about 1 millimeter in thickness to form miniature planar, thermionic, vacuum-tube devices, with densities approaching those of conventional integrated circuits.
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