Ion backscattering | Article about ion backscattering by The Free Dictionary
ion backscattering[′ī‚än ′bak‚skad·ə·riŋ]
Large-angle elastic scattering of monoenergetic ions in a beam directed at a metallized film on silicon or some other thin multilayer system.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
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The elemental composition and the film thickness in units of "the number of arbitrary atoms per square cm" were determined using the data of Rutherford 1.8 MeV He ion backscattering