ion backscattering

ion backscattering

[′ī‚än ′bak‚skad·ə·riŋ]
(solid-state physics)
Large-angle elastic scattering of monoenergetic ions in a beam directed at a metallized film on silicon or some other thin multilayer system.
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
References in periodicals archive ?
The elemental composition and the film thickness in units of "the number of arbitrary atoms per square cm" were determined using the data of Rutherford 1.8 MeV He ion backscattering spectrometry.