ion-beam scanning

ion-beam scanning

[′ī‚än ‚bēm ‚skan·iŋ]
(electronics)
The process of analyzing the mass spectrum of an ion beam in a mass spectrometer either by changing the electric or magnetic fields of the mass spectrometer or by moving a probe.
References in periodicals archive ?
Most methods currently available for the detection of voids in TSV are destructive and require extensive sample preparation--such as focused ion-beam scanning electron microscopy (FIBSEM) and x-ray tomography--or lack the resolution needed for detecting sub-micron voids (conventional scanning acoustic microscopy).