micro-electro-mechanical system

micro-electro-mechanical system

[¦mī·krōi‚lek·trə·mə′kan·ə·kəl ‚sis·təm]
(engineering)
A system in which micromechanisms are coupled with microelectronics, most commonly fabricated as microsensors or microactuators. Abbreviated MEMS. Also known as microsystem.
References in periodicals archive ?
also makes fiber-optic components, specializing in tiny mirrors called micro-electro-mechanical systems, or Mems.

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