microactuator

microactuator

[‚mī·krō′ak·chə‚wād·ər]
(engineering)
A very small actuator, with physical dimensions in the submicrometer to millimeter range, generally batch-fabricated from silicon wafers.
References in periodicals archive ?
PHOTO : This microactuator, fabricated by researchers at Univ.
A new microactuator generates 100 times more power than existing microsystems.
"Finite Element Analysis of a IBM Suspension Integrated with a PZT Microactuator." Sensors and Actuators A: Physical 100: 257-263.
Reader, writer, heater, temperature-activated circuits (TA), and microactuator are connected by the electrical circuits.
[26] evaluated a microactuator device by electrodepositing a polypyrrole film onto the gold-coated side of an AFM microcantilever.
The microactuator's moving part is fabricated using MetalMUMPS, and its fixed part includes a ring permanent magnet and a solenoid to realize a large displacement.
Finally, a parametric study will be done to investigate some dynamical features for the microactuator.
Shen, "Development of a lead-zirconate-titanate (PZT) thin-film microactuator probe for intracochlear applications," Sensors and Actuators, A: Physical, vol.
In this study, we present a novel microactuator that combines precision engineering with microsystem technologies.
The experimental assessment of a micromachined capacitive incremental position sensor for nanopositioning of microactuator systems with a displacement range of 100 [micro]m or more was reported in [6].
Karpiel, "Prototype of piezoelectric microactuator with two degrees-of-freedom," in Proceedings of the 2nd National Conference on nano and micro robotics, Krasiczyn, Rzeszow University of Technology Printing House, Rzeszow, Poland, July 2010.