Final chapters are dedicated to heat exchanges in microfluidic system; microfabrication
methods; and examples of products and devices of microfluidics, including interconnects, valves, and pumps.
Fabrication technologies and materials are considered in chapters on microfabrication
in metals and polymers, silicon microfabrication
for microfluidics, and microfabrication
in ceramics and glass.
Their topics include microfabrication
using x-ray lithography, the size effect in micromachining, laser-based fabrication, pulsed water drop micromachining, deposition routes and applications for nanocrystalline diamond, and commercialization issues.
Adoption of microelectromechanical system (MEMS) sensors, a miniaturized form of conventional ICs manufactured by using microfabrication
technology, is witnessing a tremendous surge.
With proprietary MEMS printheads, printing at the sub-micron level is possible, enabling additive, non-contact and digital industrial microfabrication
The Nanoscribe Quantum X targets specific needs in modern industrial microfabrication
. Within its compact housing, prototypes of refractive and diHractive micro-optics, in addition to polymer masters, can be product produced.
Photolithography is a microfabrication
method in the semiconductor industry, Ilika explained.
Here the authors report a framework for engineering three-dimensional integrated stretchable electronics by combining strategies in material design and advanced microfabrication
. The authors' three-dimensional devices are built layer by layer through transfer printing pre-designed stretchable circuits on elastomers and creating vertical interconnect accesses using laser ablation and controlled soldering.