microlithography

microlithography

[‚mī·krō·li′thäg·rə·fē]
(materials)
The transfer of a pattern or image from one medium to another, as from a mask to a wafer, with image features in the micrometer range or smaller.

microlithography

Using X rays instead of light rays to form the patterns of elements on a chip.
References in periodicals archive ?
This introduction to the science of microlithography focuses on the tools used to manufacture integrated circuits and explains each step in the lithographic process.
Cirtemo's MagAssemble nanopatterning technology provides a low-cost and high-throughput alternative to the traditional microlithography techniques used to produce 2D patterned structures.
Mycronic develops, manufactures and markets laser writers used for microlithography. It also manufactures SMT placement machines and stencil-free printers for the electronics industry.
Using microlithography, the researchers printed tiny, flexible pillars made of a silicon-based organic polymer.
With the investment in SwissLitho AG, Heidelberg Instruments will be able to serve customers with an additional choice of tools and options in the Nano- and Microlithography field.
Mycronic develops, manufactures and markets laser writers used for microlithography. Mycronic also manufactures SMT placement machines and stencil-free printers for the electronics industry.
Kubis et al., "Holistic approach for overlay and edge placement error to meet the 5nm technology node requirements," in Proceeding SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 14 pages, San Jose, CA, USA, 2018.
Microlithography and coating advances allow constructing multi-patterned arrays of optical filters.
Extreme Ultra-Violet ("EUV") with wavelengths below about 50 nm and more specifically around and below 13.5 nm can be used in microlithography processes to enhance the resolution of optical systems that are limited by the diffraction limit of light accompanying miniaturization of semiconductor integrated circuits.
Grant Willson in the field of top-down, nano-fabrication technologies, including semi-conductor microlithography and nano-imprint lithography with an emphasis on novel photoresist and imprint materials.
Nanometrology has a crucial role in producing devices with a high degree of accuracy and reliability in high technology fields such semiconductor test and measurement, optical alignment, nanoimprinting, scanning microscopy and microlithography.
* Novel visible light cationic photoinitiators and their uses in microlithography and related applications