micromachine


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micromachine

[′mī·krō·mə‚shēn]
(materials)
A micrometer-size mechanical device; compared with an integrated circuit, it has some mechanical parts that stand above the substrate or move freely over it.

micromachine

A MEMS device, which is measured in micrometers. See MEMS.


A Bunch of Micromachines
Microfabrica's EFAB system was the first MEMS foundry process to accept CAD files as input, turning customer designs into micromachines much faster than traditional methods. EFAB builds the devices one metal layer at a time. In this image, the square at the top is a microfluidics device with internal passageways used for a "lab on a chip." The multi-arm device (center) is a fuel injection nozzle. Bottom left is an accelerometer (C-shaped wings), and bottom right is an inductor used in RF circuits. (Image courtesy of Microfabrica Inc., www.microfabrica.com)
References in periodicals archive ?
Slow and weak, the rotors circle at about twice the speed of the second hand on a watch and generate only a ten-thousandth as much torque as typical electrically powered micromachines do.
But he says his initial NASA brief to design a muscle-powered micromachine to repair spacecraft punctures is still several decades away.
When researchers first started tinkering with micromachines in the 1970s, they drew heavily on microchip technology (see "Making a Micromachine Part, "p.
While micromachines may only be curiosities now, Japan takes their future very seriously.
With a second drive train, the micromachine generates maximum torque and completely rotates the gear.
In a Los Angeles laboratory, researchers have let loose scores of what amount to living micromachines.
For administrative and legal reasons, the money will flow through the New Energy Development Organization (NEDO)--a MITI-affiliated public organization--to the Micromachine Center, a new public-private foundation, which will disburse the funds.
Nonsemiconductor materials, such as those with magnetic, ferroelectric, or piezoelectric properties, also are being investigated for micromachine applications.
Tired of grinding their gears, micromachine researchers turn to surface science