octafluorocyclobutane


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octafluorocyclobutane

[¦äk·tə¦flu̇r·ō‚sī·klō′byü‚tān]
(organic chemistry)
C4F8 A colorless gas or liquid with a boiling point of -4°C and a freezing point of -41.4°C; soluble in ether; used as a dielectric, refrigerant, and aerosol propellant.
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DRIE involves a cyclical bombardment of chemical species (in this case, sulfur hexafluoride, SF6, and octafluorocyclobutane, C4F8).