Figure 1 shows a laser based measurement setup (also called optical lever method) wherein a laser beam, reflected from the surface of the cantilever, is detected by split photo-detectors that can measure the deflections with high accuracy (0.1 nm) as reported by Fritz et al.
Later, the thiol self-assembled mono-layers (SAMs) on the other cantilever (sensor) were observed with optical lever and interferometry methods.
The deflection caused is then measured with an
optical lever, and because the probe is so small (20 x 20.05 [micro]m measurements of microwave fields can be made as near as 20 [micro]m to the circuits.
Optical Lever Noise: Diffraction limited optics with a low coherence light source provide the most sensitive optical lever detection scheme commercially available, 0.03 mn RMS in a 0.1 Hz to 1 kHz bandwidth.
Optical Lever Interference: Typically, most SPMs have optical interference caused by laser light reflecting off the cantilever and light reflecting off the sample.
One way would be to use an "
optical lever." Attach a flat mirror to one part, point a telescope at it, and view the reflected image of a distant scale.
A motion detection system, typically an
optical lever with a laser shining on the probe, keeps track of how the cantilever tip is moving up and down.
When scanning, the interaction between the tip and the sample is monitored by an
optical lever, or a beam-deflection system.
All of Tencor's FLX systems measure stress using an "
optical lever cantilever beam" technique.