optical mask


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optical mask

[′äp·tə·kəl ′mask]
(electronics)
A thin sheet of metal or other substance containing an open pattern, used to suitably expose to light a photoresistive substance overlaid on a semiconductor or other surface to form an integrated circuit.
References in periodicals archive ?
The next step consisted in set the substrate and the optical mask into a mask aligner KSM model MJB 3 with a mercury lamp (900 W) and expose both to the UV light ([lambda] = 405 nm) per 70 seconds.
The M2 optical gas mask provided improvements over the standard MI optical mask by mounting the filter on the soldier's side instead of behind the head.
This project seeks a method to automatically align the two optical masks used in the system, reducing the time and expertise required to setup the system.
General topics cover the design, processes and equipment created for production in such topics as mask writing (including e-beam and laser mask writers), conventional and advanced optical masks, NGL masks such as electron beam projection and ion projection lithography, mask processing, materials and pellicles, including descriptions of mask substrates, resists, and optical properties, and mask metrology, inspection, evaluation, and repairs (yes, they can be done).