The Industrial Technology Research Institute's Epitaxy
Optimum Coupling System (EOCS)--digitized determination of MOCVD epitaxy based on fluidic flow, chemical and multiphysics parameters--improves upon standard MOCVD processes in function and performance.
From the analysis, it was shown that there existed an
optimum coupling coefficient [k.sub.12,opt] that allowed maximum efficiency as a function of the coupling coefficient [k.sub.23], which was varied with the distance and orientation of the coils.