photolithography


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photolithography

Electronics a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process

Photolithography

 

(1) A special photographic process that uses high-resolution photoresists. The purpose of the process is to produce an aperture, or window, of a given configuration in the layer of a photoresist in order to permit access of an etching agent to a semiconductor plate coated with an oxide film and situated beneath the photoresist layer. The windows are formed upon exposure of the photoresist to ultraviolet radiation or an electron beam, as a result of which negative photoresists become insoluble and positive photoresists become soluble. One of the many uses of photolithography is to produce an ordered arrangement of hundreds of thousands of tiny holes in the aperture masks used in color television kinescopes.

(2) A photomechanical method for the production of a lithographic printing plate, in which the image from a negative is copied onto a light-sensitive film covering the surface of a lithographic stone or metal sheet. After developing, the copy is subjected to a chemical treatment that divides the surface into printing and blank spaces. Photolithography has been used only rarely in the 20th century.

photolithography

[¦fōd·ō·li′thäg·rə·fē]
(graphic arts)
Lithography in which photographically produced plates or masks are used.

photolithography

A lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface.

A photomask is created with the design for each layer of the board or wafer (chip). The board or wafer is coated with a light-sensitive film (photoresist) that is hardened when exposed to light shining through the photomask. The board or wafer is then exposed to an acid bath (wet processing) or hot ions (dry processing), and the unhardened areas are etched away. See chip and printed circuit board.
References in periodicals archive ?
APAC is the fastest-growing region in the photolithography equipment market"
First, the researchers used photolithography to pattern onto the metal layer multiple copies of a cross-shaped template of six squares.
Brion's Tachyon systems are able to conduct high-precision photolithography simulation for an entire photomask at very high speed -- unlike conventional verification software that performs simulation on only a small, limited area of the mask.
Also for photolithography applications, the Company is introducing a Water for Immersion System for supplying ultra-clean water, up to 2 L/min, for immersion lithography tools.
Litel is dedicated to adding value to the semiconductor photolithography community by providing innovative, easy to use and inexpensive products that improve the performance and yield of photolithography tools.
According to Cymer President and Chief Operating Officer Ed Brown, "The XLR represents the latest innovation in laser light source architectures for photolithography.
Cymer (Nasdaq:CYMI) dominates the market for DUV light sources contained within excimer laser-based photolithography systems used in the production of semiconductors.
com), a leading supplier of lattice engineering and photolithography process control tools, today announced the release of Matchbox(TM), the latest component of their CDS Accelerate suite.
These statements include, but are not limited to, references to Cymer providing light source spectra for KLA-Tencor's PROLITH tool and expectations for the tool's performance; the companies' joint development of the tool's future enhancements; the benefits that KLA-Tencor's customers may be expected to realize from using this tool; the apparent need to make this tool available to KLA-Tencor's customers due to the requirement for increasing accuracy in semiconductor photolithography processes and the growing need to be able to measure the effectiveness and accuracy of lithography processes currently utilized in production; and the potential benefits that Cymer's expertise may make available to KLA-Tencor and its customers.
is the world's leading supplier of DUV laser illumination sources, the essential light source for DUV photolithography systems.