The object of the contract is an icp-rie plasma etching
system for proportional and binary plasma etching
in dielectric, Semiconducting and metallic materials and functional layers (fused silica, Silicon, Sioxny, Silicon carbide, High-breaking materials such as ta2o5, Nb2o5, Etc.
Technology is a total, cost-effective, safe, and environmentally-sound solution to many of the surface preparation problems faced by manufacturers using the latest materials.
Ranson, CNRS-University d'Orleans; and "Development and characterization of imprint-resists as masks for plasma etching
NIST scientists have recently developed and validated a model for predicting the kinetic energy of ions in plasma etching
reactors used by the semiconductor industry.
In plasma etching
, a technician mounts a silicon wafer inside a vacuum chamber and injects a gas.
The program includes presentations on plasma-surface interaction, plasma diagnostics, plasma etching
for interconnects, post-etch strip and clean and deep plasma etching
at the state of the art.
Contract notice: Delivery, Installation, Commissioning and final acceptance of a plasma etching
system for the semiconductor laboratory of the max planck society.
The Tegal 981ACS is the latest in a series of diode plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching
The Tegal 901ACS is the latest in a series of capacitively coupled diode plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching
The Tegal 915 is one of a series of diode and batch plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching
NASDAQ:TRKN), a technology leader of plasma etching
and deposition systems for the global semiconductor industry, today announced the closing of their consolidation through merger.
Maydan joined Applied Materials in 1980 to spearhead the development of a series of plasma etching