Depending on the volume of parts and customer needs, the parts may be scanned on a manual or partly automated C-mode scanning acoustic microscope
(CSAM), or on a fully automated tray scanner.
The C-SAM, or C-Mode Scanning Acoustic Microscope
, is an ultra-high-frequency ultrasonic imaging system that looks inside opaque samples and reveals internal features such as defects and construction details.
Those samples were measured with the scanning acoustic microscope
Sonix HS-1000 using a 50 MHz focused lens with an aperture of 12[degrees] (Fig.
By 1973, Quate and colleague Ross Lemons had invented the scanning acoustic microscope
. This device used sound waves to show flaws beneath the surface of a silicon chip.
One way to determine hidden structures and defects is to use a scanning acoustic microscope
. "An acoustic microscope allows you to see through structures that are not optically transparent," says Anita Rohm, head of product development at Leica Mikroskopie and Systeme GmbH, Wetzlar.