Depending on the volume of parts and customer needs, the parts may be scanned on a manual or partly automated C-mode
scanning acoustic microscope (CSAM), or on a fully automated tray scanner.
The C-SAM, or C-Mode
Scanning Acoustic Microscope, is an ultra-high-frequency ultrasonic imaging system that looks inside opaque samples and reveals internal features such as defects and construction details.
Those samples were measured with the
scanning acoustic microscope Sonix HS-1000 using a 50 MHz focused lens with an aperture of 12[degrees] (Fig.
By 1973, Quate and colleague Ross Lemons had invented the
scanning acoustic microscope. This device used sound waves to show flaws beneath the surface of a silicon chip.
One way to determine hidden structures and defects is to use a
scanning acoustic microscope. "An acoustic microscope allows you to see through structures that are not optically transparent," says Anita Rohm, head of product development at Leica Mikroskopie and Systeme GmbH, Wetzlar.