The subsequent cleaning of the highly explosive gaseous silicon tetrafluoride
(28SiF4) and its conversion to silane (28SiH4), and subsequently to polycrystalline silicon was pioneering work which took place at the Institute of Chemistry of High-Purity Substances of the Russian Academy of Sciences in Nizhny Novgorod.
Love was able to detect a steady rise in the concentration of silicon tetrafluoride
gas emitted by the volcano just prior to eruptions in 1997, even from sites u]) to 17 km away.
Now all five ion implantation gases including Arsine, Phosphine, Boron Trifluoride and Silicon Tetrafluoride
are available as Safe Delivery Source products from Matheson EPG.
In the dihydrate phosphoric acid process, fluorine is evolved as a silicon tetrafluoride